12. What is the application range of protective coatings?
Protective coatings are available for a large variety of applications, e.g. for the protection of waferbacksides:
Protective coatings are generally applied by spin coating. Protective coatings AR-PC 504, X AR-PC 5000/19, and 5000/30 contain polymethacrylate and tend to show the so-called “candy-floss“-effect at suboptimal rotational speeds. This effect can be reduced with a lower rotational speed, local exhaustion, and the removal of the “candy floss” with a glass rod during spin coating. Recommended are coatings at 1000 rpm.